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US 12,293,950 B2Granted
Semiconductor devices and methods of manufacturing semiconductor devices
AssigneeAmkor Technology Japan, Inc.
InventorsShojiro Hanada, Shingo Nakamura
Life of this patent
Estimating the term…
Abstract
In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.
Claims18
A semiconductor device, comprising:
- a cavity substrate comprising a base and a sidewall to define a cavity;
- an electronic component on a top side of the base in the cavity;
- a lid over the cavity and over the sidewall;
- and
- a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity;
- wherein the valve comprises a through-hole in the lid between the lid and the sidewall of the cavity substrate.
3 more elements
A semiconductor device, comprising:
- a substrate comprising a base and a sidewall extending vertically from the base;
- a lid over the sidewall to define a cavity between the base, the sidewall, and the lid;
- an electronic component in the cavity;
- a valve between the cavity and an exterior environment outside the cavity;
- a seal between the lid and the sidewall;
- and
- a plug in the valve;
- wherein the seal and the plug hermetically seal the cavity from the exterior environment;
- and
- wherein the valve comprises a through-hole in the lid between the lid and the sidewall of the substrate.
7 more elements
A method to manufacture a semiconductor device, comprising:
- providing a cavity substrate comprising a base and a sidewall to define a cavity;
- providing an electronic component on a top side of the base in the cavity;
- providing a lid over the cavity and over the sidewall, wherein:
- the lid comprises a valve to provide access to the cavity;
- and
- the valve comprises a through-hole in the lid between the lid and the sidewall of the cavity substrate;
- and
- providing a plug in the valve to provide a seal between a cavity environment and an exterior environment outside the cavity.
5 more elements
Dependencies are inferred from the claim text.