Single crystal growth susceptor assembly with sacrifice ring
AssigneeGlobalWafers Co., Ltd.
InventorsHong-Huei Huang, Benjamin Michael Meyer, Chun-Sheng Wu, Wei-Chen Chou, Chen-Yi Lin, Feng-Chien Tsai
Life of this patent
Estimating the term…
Loading patent…
AssigneeGlobalWafers Co., Ltd.
InventorsHong-Huei Huang, Benjamin Michael Meyer, Chun-Sheng Wu, Wei-Chen Chou, Chen-Yi Lin, Feng-Chien Tsai
Estimating the term…
A susceptor assembly for supporting a crucible during a crystal growth process includes a susceptor base, a tubular sidewall connected to the susceptor base, and a removable sacrifice ring interposed between the susceptor base and the sidewall. Each of the susceptor base and the sidewall is formed of a carbon-containing material. The susceptor base has an annular wall and a shoulder extending radially outward from an outer surface of the annular wall. The sidewall has a first end that receives the annular wall to connect the sidewall to the susceptor base. The sacrifice ring has a first surface that faces the outer surface of the annular wall, a second surface that faces an interior surface of the sidewall, and a ledge extending outward from the second surface that engages the first end of the sidewall.
A susceptor assembly for supporting a crucible during a crystal growth process, the susceptor assembly comprising:
A method of assembling a susceptor for supporting a crucible during a crystal growth process, the method comprising:
An ingot puller for producing single crystal semiconductor ingots, the ingot puller comprising:
Dependencies are inferred from the claim text.