Resonant cavity surface acoustic wave (SAW) filters
AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche
Life of this patent
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AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche
Estimating the term…
A coupled cavity filter structure that uses a surface acoustic wave, in particular, a guided surface acoustic wave, comprises an acoustic wave propagating substrate, at least one input transducer structure and one output transducer structure, provided over the substrate, each comprising inter-digitated comb electrodes, at least one reflecting structure comprising at least one or more metallic strips positioned at a distance and in between the input and output transducer structures, in the direction of propagation of an acoustic wave. The acoustic wave propagating substrate is a composite substrate comprising a base substrate and a piezoelectric layer. In additional embodiments, a coupled cavity filter structure comprises a groove. In additional embodiments, a SAW ladder filter device comprises at least two coupled cavity filter structures as described herein, wherein the at least two coupled cavity filter structures are positioned on a single line.
A coupled cavity filter structure for a surface acoustic wave, comprising:
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