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US 12,289,092 B2Granted
Clock device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMarc Sansa Perna, Philippe Robert
Life of this patent
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Abstract
The present description concerns a clock signal generation device (902) comprising: a microelectromechanical resonant element (504); and at least one nanoelectromechanical transduction element (512).
Claims15
Square-extensional mode clock signal generation device comprising:
- a microelectromechanical resonant element overhanging a surface of a substrate and having, in top view, a square shape and, at each corner of the square shape, a beam arranged perpendicularly to a diagonal of the square shape running through the corner, the ends of each beam being respectively coupled to the substrate by anchorages perpendicular to an axis of the beam;
- and
- four nanoelectromechanical transduction elements arranged perpendicularly to the beams and continuing the diagonals of the square shape, each of the four nanoelectromechanical transduction elements being coupled to one of the beams and further coupled to the substrate by an anchorage.
Dependencies are inferred from the claim text.