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US 12,288,711 B2Granted
Methods of operating die attach systems
AssigneeAssembleon N.V.
InventorsAlain De Bock, René Bouman
Life of this patent
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Abstract
A method of operating a die attach system is provided. The method includes the step of providing a verification substrate configured to receive a plurality of die, the verification substrate including a plurality of substrate reference markers. The method also includes the step of imaging each of the plurality of die with respective ones of the plurality of substrate reference markers using an imaging system of the die attach system for determining an alignment of the plurality of die with the verification substrate.
Claims15
A method of operating a die attach system, the method comprising steps of:
- providing the die attach system, the die attach system including (i) a verification substrate configured to receive a plurality of die, the verification substrate including a plurality of substrate reference markers, (ii) an imaging element, (iii) a bond tool configured to contact each of the plurality of die during a transfer from a die supply source to the verification substrate, and (iv) a supply support for supporting the die supply source, the die supply source being positioned between the bond tool and the verification substrate;
- imaging each of the plurality of die with respective ones of the plurality of substrate reference markers in a single field-of-view using the imaging element from the die attach system;
- and
- determining an alignment of the plurality of die with the verification substrate using an image taken during imaging of each of the plurality of die with respective ones of the plurality of substrate reference markers.
1 more element
Dependencies are inferred from the claim text.