Micro-electromechanical system switch and communication device
AssigneesBeijing BOE Technology Development Co., Ltd., Boe Technology Group Co., Ltd.
InventorsYingli Shi, Yanzhao Li
Life of this patent
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Abstract
The disclosure provides a micro-electromechanical system switch and a communication device. The micro-electromechanical system switch includes: a substrate; a DC bias line, arranged on one side of the substrate; a first signal transmission line and a second signal transmission line, arranged on the same side of the substrate as the DC bias line; a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located; and a fixing structure, arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located and not in contact with the first signal transmission line, where the fixing structure connects the free end and the substrate.
Claims20
A micro-electromechanical system switch, comprising:
- a substrate;
- a direct current (DC) bias line, arranged on one side of the substrate;
- a first signal transmission line and a second signal transmission line, arranged on a same side of the substrate as the DC bias line, wherein the first signal transmission line and the second signal transmission line are spaced side-by-side from the DC bias line, and the first signal transmission line and the second signal transmission line are arranged on two sides of the DC bias line;
- a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located;
- wherein the cantilever beam spans the DC bias line and a gap is provided between the cantilever beam and the DC bias line in a direction perpendicular to the substrate;
- the cantilever beam comprises a fixed end and a free end;
- the fixed end is connected to the second signal transmission line;
- an orthographic projection of the free end on the substrate is within an orthographic projection of the first signal transmission line on the substrate;
- and in the direction perpendicular to the substrate, a gap is provided between the free end and the first signal transmission line;
- and
- a fixing structure, comprising a connecting portion and a fixing portion, and being not in contact with the first signal transmission line;
- wherein the connecting portion is arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located,
- wherein the connecting portion and the cantilever beam are disposed in a same plane parallel to the substrate;
- the connecting portion is connected to the free end, and the fixing portion connects the connecting portion and the substrate;
- and
- a height of the fixing portion in the direction perpendicular to the substrate is larger than a thickness of the first signal transmission line in the direction perpendicular to the substrate.
Dependencies are inferred from the claim text.