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US 12,287,587 B2Granted
Damping arrangement for vibration damping of an element in an optical system
AssigneeCarl Zeiss SMT GmbH
InventorsMarwene Nefzi, Stefan Hembacher, David Schoenen, Jens Kugler
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Abstract
The disclosure relates to a damping arrangement for vibration damping of an element in an optical system, for example in a microlithographic projection exposure apparatus. A damping arrangement according to the disclosure has an element, a fluid located in a cavity, and at least one channel connected to the cavity. A vibration of the element causes vibration energy of the element to be dissipated by partial displacement of the fluid from the cavity into the at least one channel.
Claims22
A damping arrangement, comprising:
- a first element comprising an interior defining a cavity;
- a fluid located in the cavity of the first element;
- and
- a second element different from the first element, the second element being spaced from the first element, the second element comprising an interior, the interior of the second element defining a channel connected to the cavity of the first element,
- wherein the damping arrangement is configured so that a vibration of the first element causes vibration energy of the first element to be dissipated by partial displacement of the fluid from the cavity of the first element into the channel of the second element.
2 more elements
A system, comprising:
- an optical element comprising a cavity;
- a fluid located in the cavity of the optical element;
- and
- a second element different from the optical element, the second element being spaced apart from the optical element, the second element comprising an interior, the interior of the second element defining a channel connected to the cavity of the optical element,
- wherein:
- the damping arrangement is configured so that a vibration of the optical element causes vibration energy of the optical element to be dissipated by partial displacement of the fluid from the cavity of the optical element into the channel of the second element;
- and
- the system is a microlithographic projection exposure apparatus.
5 more elements
A damping arrangement, comprising:
- a first element comprising an interior defining a cavity;
- a fluid located in the cavity of the first element;
- a second element different from the first element, the second element being spaced from the first element, the second element comprising an interior, the interior of the second element defining a channel connected to the cavity of the first element;
- and
- a third element different from both the first and second elements,
- wherein the damping arrangement is configured so that a vibration of the third element causes vibration energy of the third element to be dissipated by partial displacement of the fluid from the cavity of the first element into the channel of the second element.
3 more elements
Dependencies are inferred from the claim text.