Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

A control valve comprising:

• a passageway having a portion defining an opening for the flow of liquid and/or gas therethrough;
• an obstructing structure displaceable relative to the opening for obstructing the opening by differing amounts thereby to regulate a volumetric flow rate of liquid and/or gas through the opening;
• a piezo actuator;
• and
• a linkage mechanism configured to amplify a magnitude of a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the obstructing structure relative to the opening,
• wherein the linkage mechanism comprises a member connected to the piezo actuator, wherein, when the piezo actuator expands in a first direction due to a potential difference applied thereto and causes movement of a portion of the member of the linkage mechanism, movement of the portion of the member of the linkage mechanism causes movement of the obstructing structure in a second direction different than the first direction, and
• wherein the piezo actuator cantilevers from a support.

A control valve comprising:

• a passageway having a portion defining an opening for the flow of fluid therethrough;
• an obstructing structure, displaceable relative to the opening, to obstruct for the opening by differing amounts to regulate a flow of the fluid through the opening;
• a piezo actuator;
• and
• a linkage mechanism configured to amplify a magnitude of a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the obstructing structure relative to the opening,
• wherein the linkage mechanism comprises a portion moveable in a first direction while being substantially restrained in a second direction different to the first direction, the piezo actuator arranged such that an expansion of the piezo actuator results in movement of the moveable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the obstructing structure.