Three-axis MEMS gyroscope

A three-axis micro-electro-mechanical system (MEMS) gyroscope, comprising:

• a substrate;
• a sensing unit elastically connected with the substrate;
• and
• a driving unit coupled with the sensing unit and driving the sensing unit to move;
• wherein the substrate is of a rectangular shape;
• the substrate comprises four anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures;
• and an avoiding space is formed between each two adjacent coupling structures;
• wherein the driving unit comprises four driving pieces located at an interior of the four corners of the substrate;
• one ends of each of the driving pieces are elastically connected with an adjacent coupling structure;
• the four driving pieces are frame-shaped;
• the four driving pieces are enclosed to form a ring shape and are symmetrically arranged;
• wherein the sensing unit comprises four X and Y mass blocks and four Z mass blocks;
• each of the four X and Y mass blocks is arranged in a corresponding avoiding space;
• the four X and Y mass blocks are respectively elastically connected with adjacent coupling structures to form a rectangular frame;
• each of the Z mass blocks is elastically connected with a corresponding driving piece and is arranged on one side of the corresponding driving piece away from a corresponding anchor point structure;
• each two adjacent Z mass blocks are elastically connected with each other, each of the anchor point structures comprises a plurality of sub-anchor points with a same shape and arranged at intervals;
• each of the coupling structures comprises a coupling ring sleeved on outer sides of corresponding sub-anchor points;
• an inner side of each coupling ring extends inward toward a space between the corresponding sub-anchor points to form coupling beams connected with the corresponding sub-anchor points;
• the coupling beams of each coupling ring comprises a first bending portion extending inward toward the space of the corresponding sub-anchor points.