Multi-stage turbomolecular pump
AssigneeEdwards Limited
InventorsNigel Paul Schofield, Stephen Dowdeswell
Life of this patent
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AssigneeEdwards Limited
InventorsNigel Paul Schofield, Stephen Dowdeswell
Estimating the term…
A vacuum pump comprising a turbomolecular stage and a drag stage, the vacuum pump comprising a stator and a rotor. The rotor comprises a turbomolecular rotor and a drag rotor attached together. The turbomolecular rotor comprises a hub from which a plurality of blades extend, the hub comprising a mounting portion for mounting to a spindle of a motor and a hollow cylindrical portion, the hollow cylindrical portion extending from the mounting portion towards an outlet end of the turbomolecular stage. The drag rotor comprises a cylindrical skirt and an attachment part extending away from the cylindrical skirt, the attachment part extending within the hollow cylindrical portion of the hub of the turbomolecular rotor and being attached thereto at a point that is closer to the mounting portion than to the outlet end of the turbomolecular rotor.
A vacuum pump comprising:
Dependencies are inferred from the claim text.