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US 12,285,811 B2Granted
Method of machining brittle materials
AssigneeUniversity of Newcastle Upon Tyne
InventorsZi Jie Choong, Dehong Huo, Patrick Degenaar, Anthony O′Neill
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Abstract
A method of cutting (e.g. micro-milling) brittle materials where a protective ductile layer is present on the brittle material during the cutting step. The method offers an improved edge quality of the machined profile relative to previous cutting (e.g. micro-milling) techniques. A machined product obtained by or obtainable by this method is disclosed.
Claims15
A method of cutting a channel in a brittle material comprising:
- providing a composite material in which a layer of ductile material is arranged on a surface of a brittle material;
- and
- cutting a channel having a length through the layer of ductile material, removing a portion of the ductile material that is arranged over a portion of the brittle material that is to be cut, and into the brittle material to provide a machined composite;
- wherein:
- the channel is cut by milling, grinding, turning, drilling, or fly cutting;
- the ductile material is an acrylic polymer or an epoxy resin;
- the brittle material is monocrystalline silicon;
- at least a portion of the length of the channel is cut along the <100> direction of the monocrystalline silicon;
- and
- the layer of ductile material is from 25 to 500 μm thick.
7 more elements
Dependencies are inferred from the claim text.