Preparation method and use method of material for deep purification of HF electronic gas

A method for preparing a material for deep purification of HF electronic gas, comprising:

• in parts by mass, dissolving 15.2-45.4 parts of acetate in 2000-4000 parts of pure water, and stirring for 10-30 min;
• after dissolving uniformly, adding 126.4-186.5 parts of disodium ethylenediaminetetraacetate, and stirring for 10-20 min to form a mixed solution;
• then adding 7.2-7.8 parts of ammonium fluoride and stirring;
• after mixing evenly, adding ammonia dropwise to adjust a pH value to 9-11;
• then adding 130-170 parts of mesoporous activated carbon and 0.1-0.5 parts of sodium tetrafluoroborate as an inducer, and stirring at 40-60° C. for 20-50 min;
• subsequently, transferring a resulting mixture to a hydrothermal reactor, and subjecting to a crystallization reaction at 140-180° C. for 80-120 min;
• thereafter, cooling slowly to room temperature, filtering to obtain a material, and washing with absolute ethanol;
• repeating washing with absolute ethanol for 3-5 times, and then drying a resulting material in an oven at 120-160° C. for 10-18 h to obtain a metal fluoride-loaded activated carbon material AC/MFx·nH2O;
• subjecting the metal fluoride-loaded activated carbon material to a deep dehydration to obtain a material for deep purification of HF electronic gas AC/MFx;
• wherein the mesoporous activated carbon is a mesoporous activated carbon with a high mesoporosity, and a process for preparing the mesoporous activated carbon with a high mesoporosity comprises:
• in parts by mass, adding 7-34 parts of ammonium dihydrogen phosphate, 16-44 parts of dodecylurea, 1-8 parts of urea and 0.05-0.3 parts of 1-butyl-3-methylimidazolium molybdotungstophosphate into 1000-3000 parts of water and stirring;
• after mixing evenly, soaking 100-200 parts of a cleaned wood dust in a resulting mixed solution at room temperature for 5-10 h, and then heating to 40-80° C. and treating for 30-40 min;
• then taking out the wood dust, drying and then drying in an oven at 200-280° C. for 30-60 min by blowing air;
• subsequently, pulverizing and sintering the pulverized material in a high-temperature furnace under an inert atmosphere at a temperature of 400-800° C. for 1-6 h;
• then controlling a temperature at 300-400° C., introducing an activated gas, and treating for 20-40 min;
• thereafter, purging with dried nitrogen for 5-10 min to obtain the mesoporous activated carbon with a high mesoporosity, wherein the activated gas includes 10%-25% of air, 5%-20% of water vapor and the balance of nitrogen.