US 12,285,215 B2 · Systems and methods for measurement of optical workpieces

Abstract

An analytic tool for supporting alignment of an optical component in preparation for an interferometric test and performance of such a test. Apparatus and methods involve employment of the datum features on the optical component and/or metrology frame supporting such component. The metrology frame may include a secondary set of holograms (provided for use with a conventional system already employing a primary hologram that forms the testing optical wavefront). The conventional primary hologram is preferably substituted with a set of primary holograms (contained in the same, unitary or spatially-complementary housing sets) that perform different but complementary functions and that facilitate the alignment of the metrology frame with or without the tested optical component.

Claims26

Dependent claims

An apparatus for aligning an optical workpiece with a measurement system for measurement, the apparatus comprising:

the measurement system comprising:
a metrology system comprising a light source configured to produce light and a detector configured to detect return light;
and
an optical system aligned with the optical metrology system, the optical system comprising:
an alignment hologram configured to produce alignment light in response to the light produced by the metrology system;
and
a measurement hologram configured to produce measurement light in response to the light produced by the metrology system for measurement of the optical workpiece;
a measurement frame that locates the optical workpiece with respect to the measurement light produced by the measurement hologram for measurement of the optical workpiece;
and
at least one alignment feature coupled to the measurement frame and configured to return the alignment light produced by the alignment hologram to the detector to align the measurement frame with respect to the measurement system.

7 more elements

Dependencies are inferred from the claim text.

Systems and methods for measurement of optical workpieces

Life of this patent

Systems and methods for measurement of optical workpieces

Life of this patent

Abstract

Claims26