Infrared detector and infrared image sensor including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsMaxim Vladimirovich Ryabko, Anton Nikolaevich Sofronov, Sergey Nikolaevich Koptyaev
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Abstract
An infrared detector includes a substrate in which a void is formed, a micro-resonator suspended over the void, an infrared absorber on an upper surface of the micro-resonator, a thermal isolation bridge supporting the micro-resonator, a first waveguide optically coupled with the micro-resonator, a second waveguide intersecting the first waveguide and optically coupled with the micro-resonator, a light source optically coupled with the first waveguide, and a photodetector optically coupled with the second waveguide.
Claims20
An infrared detector comprising:
- a substrate in which a void is formed;
- a micro-resonator disposed over the void of the substrate;
- an infrared absorber disposed on an upper surface of the micro-resonator;
- a thermal isolation bridge supporting the micro-resonator;
- a first waveguide optically coupled with the micro-resonator;
- a second waveguide intersecting the first waveguide and optically coupled with the micro-resonator;
- a light source optically coupled with the first waveguide;
- and
- a photodetector optically coupled with the second waveguide.
An infrared image sensor comprising:
- a pixel array comprising a plurality of infrared detection pixels arranged in a two-dimensional (2D) manner;
- a plurality of first waveguides extending in a first direction;
- a plurality of second waveguides extending in a second direction which intersects the first direction;
- a light source configured to provide light to the plurality of first waveguides;
- and
- a photodetector configured to measure an intensity of light transmitted through the plurality of second waveguides,
- wherein each of the plurality of infrared detection pixels comprises:
- a substrate in which a void is formed;
- a micro-resonator disposed over the void of the substrate;
- an infrared absorber disposed on an upper surface of the micro-resonator;
- and
- a thermal isolation bridge supporting the micro-resonator, and
- wherein the plurality of first waveguides are optically coupled with the micro-resonators of the plurality of infrared detection pixels arranged in the first direction, respectively, and
- the plurality of second waveguides are optically coupled with the micro-resonators in the plurality of infrared detection pixels arranged in the second direction, respectively.
An infrared image sensor comprising:
- a pixel array comprising a plurality of infrared detection pixels arranged in a two-dimensional (2D) manner;
- a plurality of first waveguides extending in a first direction;
- a light source configured to provide light to the plurality of first waveguides;
- and
- a visible light image sensor facing the pixel array and comprising a plurality of visible light detection pixels arranged in a 2D manner to respectively correspond to the plurality of infrared detection pixels,
- wherein each of the plurality of infrared detection pixels comprises:
- a substrate in which a void is formed;
- a micro-resonator disposed over the void of the substrate;
- an infrared absorber disposed on an upper surface of the micro-resonator;
- and
- a thermal isolation bridge supporting the micro-resonator, and
- wherein the plurality of first waveguides are optically coupled with the micro-resonators of the plurality of infrared detection pixels arranged in the first direction, respectively.
Dependencies are inferred from the claim text.