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US 12,283,943 B2Granted
Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
AssigneeMurata Manufacturing Co., Ltd.
InventorsAndrew Guyette, Neal Fenzi
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Abstract
Acoustic filters are disclosed. A bandpass filter has a passband between a lower band edge and an upper band edge. The bandpass filter includes a plurality of transversely-excited film bulk acoustic resonators (XBARs) connected in a ladder filter circuit. The plurality of XBARs includes at least one lithium tantalate XBAR and at least one lithium niobate XBAR.
Claims24
A filter having a passband between a lower band edge and an upper band edge, the filter comprising:
- a plurality of transversely-excited film bulk acoustic resonators (XBARs) connected in a ladder filter circuit, wherein:
- the plurality of XBARs includes at least one lithium tantalate (LT) XBAR and at least one lithium niobate (LN) XBAR,
- the plurality of XBARs each include a piezoelectric layer and an interdigital transducer (IDT) on only one surface of the piezoelectric layer,
- the lower band edge is defined by one or more LN XBARs from the plurality of XBARs, the piezoelectric layer of the one or more LN XBARs consisting of LN, and
- the upper band edge is defined by one or more LT XBARs from the plurality of XBARs the piezoelectric layer of the one or more LT XBARs consisting of LT.
2 more elements
A filter having a passband between a lower band edge and an upper band edge, comprising:
- a first chip comprising one or more lithium tantalate (LT) transversely-excited film bulk acoustic resonators (XBARs);
- and
- a second chip comprising one or more lithium niobate (LN) XBARs, wherein
- the one or more LT XBARs and the one or more LN XBARs are connected to form a ladder filter circuit.
1 more element
A method for fabricating a filter, comprising:
- fabricating a first chip containing one or more lithium tantalate (LT) transversely-excited film bulk acoustic resonators (XBARs);
- fabricating a second chip containing one or more lithium niobate (LN) XBARs;
- and
- connecting the first chip to the second chip,
- wherein the connecting comprises connecting an LT XBAR of the first chip to an LN XBAR of the second chip by at least one conductor.
2 more elements
Dependencies are inferred from the claim text.