Closed loop faraday correction of a horizontal beam current profile for uniform current tuning
AssigneeApplied Materials, Inc.
InventorsTyler Wills, Richard Allen Sprenkle
Life of this patent
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Abstract
A system and method for creating a beam current profile that eliminates variations that are not position dependent is disclosed. The system includes two Faraday sensors; one which is moved across the ion beam and a second that remains at or near a certain location. The reference Faraday sensor is used to measure temporal variations in the beam current, while the movable Faraday sensor measures both the position dependent variations and the temporal variations. By combining these measurements, the actual position dependent variations of the scanned ion beam can be determined. This resultant beam current profile can then be used to control the scan speed of the electrostatic or magnetic scanner.
Claims19
An ion implantation system, comprising:
- an ion source from which a spot beam is extracted;
- a scanner which scans the spot beam in a first direction to create diverging ion trajectory paths;
- an angle corrector to alter the diverging ion trajectory paths into substantially parallel paths of a scanned ion beam;
- a movable current measuring device which travels in the first direction and measures current as a function of position in the first direction, referred to as movable position current measurements and wherein the movable position current measurements comprise position dependent variations and temporal variations;
- a reference current measuring device used to create reference position current measurements that comprise temporal variations;
- and
- a controller, wherein the controller uses the movable position current measurements and the reference position current measurements to create a corrected beam current profile, wherein the reference position current measurements are used to create a beam current profile having temporal variations, and the corrected beam current profile is generated by subtracting the beam current profile having temporal variations from the movable position current measurements for all positions in the first direction.
A method of tuning an ion beam to achieve a target uniformity, comprising:
- scanning the ion beam in a first direction at a constant scan speed profile to create a scanned ion beam, wherein the scanned ion beam has position dependent variations and temporal variations;
- measuring current of the scanned ion beam using two current measuring devices, wherein a first one of the two current measuring devices is a movable current measuring device that moves across the ion beam in the first direction, wherein measurements from the first one of the two current measuring devices are referred to as movable position current measurements, measurements from a second one of the two current measuring devices are referred to as reference position current measurements, and wherein the reference position current measurements are used to create a beam current profile having temporal variations;
- subtracting the beam current profile having temporal variations from the movable position current measurements for all positions in the first direction to create a corrected beam current profile, wherein temporal variations have been reduced as compared to a beam current profile derived using only the movable current measuring device;
- and
- comparing a uniformity of the corrected beam current profile to the target uniformity, and if the uniformity is not better than the target uniformity,
- inputting the corrected beam current profile to a tuning algorithm, wherein the tuning algorithm generates a new scan speed profile based on the corrected beam current profile.
Dependencies are inferred from the claim text.