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US 12,282,315 B2Granted
Scheduling substrate routing and processing
AssigneeApplied Materials, Inc.
InventorChongyang Wang
Life of this patent
Estimating the term…
Abstract
A method includes determining queue times associated with operations of a sequence recipe. The operations are associated with production of substrates in a substrate processing system. The method further includes generating a schedule based on the queue times. The method further includes transmitting the schedule to a controller of the substrate processing system. The controller is to control the substrate processing system to produce the substrates based on the schedule.
Claims20
A method comprising:
- determining a plurality of queue times associated with a plurality of operations of a sequence recipe, the plurality of operations being associated with production of a plurality of substrates in a substrate processing system, the plurality of operations comprising one or more revisit operations of a respective substrate revisiting a corresponding processing chamber;
- identifying a plurality of time durations corresponding to the plurality of operations;
- calculating, based on a maximum time duration of the plurality of time durations, a takt time for the plurality of substrates, wherein the takt time is a calculated pace corresponding to an amount of time between a previous substrate and a subsequent substrate entering the substrate processing system, the takt time being associated with the plurality of operations comprising the one or more revisit operations;
- generating a schedule based on the takt time and the plurality of queue times;
- and
- transmitting the schedule to a controller of the substrate processing system, wherein the controller is to control the substrate processing system to produce the plurality of substrates based on the schedule.
3 more elements
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to:
- determine a plurality of queue times associated with a plurality of operations of a sequence recipe, the plurality of operations being associated with production of a plurality of substrates in a substrate processing system, the plurality of operations comprising one or more revisit operations of a respective substrate revisiting a corresponding processing chamber;
- identify a plurality of time durations corresponding to the plurality of operations;
- calculate, based on a maximum time duration of the plurality of time durations, a takt time for the plurality of substrates, wherein the takt time is a calculated pace corresponding to an amount of time between a previous substrate and a subsequent substrate entering the substrate processing system, the takt time being associated with the plurality of operations comprising the one or more revisit operations;
- generate a schedule based on the takt time and the plurality of queue times;
- and
- transmit the schedule to a controller of the substrate processing system, wherein the controller is to control the substrate processing system to produce the plurality of substrates based on the schedule.
3 more elements
A system comprising:
- memory;
- and
- a processing device coupled to the memory, the processing device to:
- determine a plurality of queue times associated with a plurality of operations of a sequence recipe, the plurality of operations being associated with production of a plurality of substrates in a substrate processing system, the plurality of operations comprising one or more revisit operations of a respective substrate revisiting a corresponding processing chamber;
- identify a plurality of time durations corresponding to the plurality of operations;
- calculate, based on a maximum time duration of the plurality of time durations, a takt time for the plurality of substrates, wherein the takt time is a calculated pace corresponding to an amount of time between a previous substrate and a subsequent substrate entering the substrate processing system, the takt time being associated with the plurality of operations comprising the one or more revisit operations;
- generate a schedule based on the plurality of queue times;
- and
- transmit the schedule to a controller of the substrate processing system, wherein the controller is to control the substrate processing system to produce the plurality of substrates based on the schedule.
6 more elements
Dependencies are inferred from the claim text.