Method for manufacturing a micromechanical device and micromechanical valve

A method for manufacturing at least one micromechanical device, comprising:

• providing a first substrate and a separate second substrate, the first substrate comprising two surfaces spaced parallel to each other with a predetermined thickness, and the second substrate comprising two surfaces spaced parallel to each other with a predetermined thickness;
• patterning a first trench structure into one of the two surfaces of the first substrate, and patterning a second trench structure into one of the two surfaces of the second substrate;
• arranging the patterned surfaces of the two substrates with respect to each other such that a substrate stack with an upper surface and a lower surface is defined, and such that the first and/or second trench structure forms at least one cavity in the substrate stack;
• thinning the substrate stack from the upper and/or lower surface of the substrate stack;
• exposing the at least one cavity by patterning a recess into the upper and/or lower surface of the substrate stack,
• wherein, in the method, exposing the at least one cavity is performed after arranging the two substrates into the substrate stack.