Tungsten hexafluoride preparation method and apparatus based on photoelectric synergy

A tungsten hexafluoride preparation method based on photoelectric synergy, comprising the following steps:

• S1, filling a photocatalyst and metal tungsten sequentially in a discharge area of a plasma reactor in a direction of gas entry;
• S2, introducing background gas and sulfur hexafluoride gas into the discharge area of the plasma reactor while irradiating the discharge area of the plasma reactor with light, the background gas is ionized into plasma, and the sulfur hexafluoride gas is activated and ionized to decompose into fluorine atoms and low-fluorine sulfides under the synergistic effect of plasma and photocatalysis;
• S3:
• having the generated fluorine atoms and low-fluorine sulfides reacted with the metal tungsten to generate tungsten hexafluoride (WF6) gas and elemental sulfur, a reaction temperature is controlled at 120-160° C., making the elemental sulfur become liquid;
• and the plasma reactor is tilted or placed vertically, such that the generated liquid elemental sulfur can flow out from a bottom of the plasma reactor for collection;
• while the generated WF6 gas is condensed into liquid and then collected;
• wherein in the step S2, reducing gas H2 is introduced while the background gas and the sulfur hexafluoride gas are introduced into the discharge area of the plasma reactor;
• wherein the metal tungsten is loaded through a metal-organic framework and then filled into the discharge area of the plasma reactor.