Suspended type nanowire and manufacturing method thereof
AssigneeKorea Advanced Institute of Science and Technology
InventorsJun-Bo Yoon, Jaeshin Lee, Kwang-Wook Choi, Min-Seung Jo
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Abstract
Provided is a suspended type nanowire that is fixed and electrically connected to each of a first electrode disposed on a substrate and a second electrode disposed on the substrate and spaced apart from the first electrode and suspended on the substrate. Here, a cross-section in a direction perpendicular to a longitudinal direction of the suspended type nanowire includes at least one curved part, and the curve part includes a reference surface and at least one side surface extending downward from the reference surface.
Claims9
A suspended type nanowire that is fixed and electrically connected to each of a first electrode disposed on a substrate and a second electrode that is disposed on the substrate and spaced apart from the first electrode, the suspended type nanowire being suspended on the substrate,
- wherein a cross-section in a direction perpendicular to a longitudinal direction of the suspended type nanowire comprises:
- a reference surface;
- and
- at least one side surface extending to be perpendicular to the reference surface, the at least one side surface having one end contacting one end of the reference surface.
Dependencies are inferred from the claim text.