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US 12,279,359 B2Granted
Linear accelerator assembly including flexible high-voltage connection
AssigneeApplied Materials, Inc.
InventorsDavid T. Blahnik, Charles T. Carlson, Robert B. Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior
Life of this patent
Estimating the term…
Abstract
Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
Claims17
A linear accelerator assembly, comprising:
- a coil resonator;
- a plurality of drift tubes coupled to the coil resonator by a set of leads;
- and
- a dielectric insulator support directly coupled to each drift tube of the plurality of drift tubes.
1 more element
An ion implanter, comprising:
- an ion source operable to generate an ion beam;
- a linear accelerator assembly operable to receive the ion beam, the linear accelerator assembly comprising:
- a coil resonator;
- and
- a plurality of drift tubes coupled to the coil resonator by a set of leads;
- and
- a dielectric insulator support directly coupled to each drift tube of the plurality of drift tubes.
4 more elements
A linear accelerator assembly, comprising:
- a coil resonator comprising a helical section and a set of inductive coupling arms extending from the helical section;
- a plurality of drift tubes coupled to each inductive coupling arm of the set of inductive coupling arms by a set of leads;
- and
- an insulator support directly coupled to each drift tube of the plurality of drift tubes.
1 more element
Dependencies are inferred from the claim text.