US 12,279,357 B1 · Electron resonance source apparatus and method of use thereof

Abstract

The invention comprises a method and apparatus for generating a plasma, comprising: (1) receiving a microwave from a co-axial cable, with a first impedance, into an electron cyclotron resonance source, the electron cyclotron resonance source comprising: a housing containing a first transform material and a transmission section; (2) passing the microwave through the first transform material with a second impedance; (3) coupling the microwave into the transmission section of the electron cyclotron resonance source, the transmission section comprising a third impedance, the transmission section comprising a first dielectric gap positioned between an inner conductor and an outer conductor; (4) generating a magnetic field with a set of magnets; and (5) accelerating cyclotron resonant electrons circulating about the magnet field with the microwave, such as where the first transform material has a thickness of one-quarter of a wavelength of the microwave.

Claims20

Dependent claims

A method for generating a plasma, comprising the steps of:

receiving a microwave from a co-axial cable, with a first impedance, into an electron cyclotron resonance source, said electron cyclotron resonance source comprising:
a housing containing a first transform material and a transmission section;
passing the microwave through said first transform material with a second impedance;
coupling the microwave into said transmission section of said electron cyclotron resonance source, said transmission section comprising a third impedance, said transmission section comprising a first dielectric gap positioned between an inner conductor and an outer conductor;
generating a magnetic field with a set of magnets;
and
accelerating cyclotron resonant electrons circulating about said magnet field with the microwave.

4 more elements

An apparatus for heating a plasma using a microwave, comprising:

a co-axial cable connector configured to receive the microwave, with a first impedance, into an electron cyclotron resonance source, said electron cyclotron resonance source comprising:
a housing containing a first transform material and a transmission section;
a transmission path, in said housing, of the microwave passing through said first transform material, said first transform material comprising a second impedance;
said transmission section further comprising a first dielectric gap positioned between an inner conductor and an outer conductor, said transmission section configured as a coupling section between said co-axial cable connector and an exit surface of said housing in said transmission path, said transmission section comprising a third impedance, and
a set of magnets, comprising at least one magnet, configured to generate a magnetic field past said exit surface into a plasma zone,
wherein cyclotron resonant electrons circulating about said magnet field in the plasma are accelerated with the microwave.

3 more elements

Dependencies are inferred from the claim text.

Electron resonance source apparatus and method of use thereof

Life of this patent

Electron resonance source apparatus and method of use thereof

Life of this patent

Abstract

Claims20