Electronic device and module including the same

An electronic device, comprising:

• a piezoelectric substrate including a first main surface;
• a functional element provided on or above the first main surface;
• an insulation material layer provided on or above the first main surface and surrounding the functional element;
• and
• a protective layer provided on or above the insulation material layer;
• wherein
• the piezoelectric substrate and the insulation material layer define a hollow portion that accommodates the functional element;
• in a cross-sectional view in a direction perpendicular to a thickness direction of the piezoelectric substrate, the protective layer includes:
• a first portion above the hollow portion;
• a second portion adjacent to the first portion at one end of the second portion;
• and
• a third portion adjacent to the second portion at another end of the second portion;
• a direction parallel to the first main surface is a first direction in the cross-sectional view in the direction perpendicular to the thickness direction of the piezoelectric substrate;
• and
• an end portion of the piezoelectric substrate in the first direction is located outwards of an end portion of the protective layer in the first direction.

An electronic device, comprising:

• a piezoelectric substrate including a first main surface;
• a functional element provided on or above the first main surface;
• an insulation material layer provided on or above the first main surface and surrounding the functional element;
• a protective layer provided on or above the insulation material layer;
• a connection electrode provided between the insulation material layer and the protective layer, the connection electrode extending to the piezoelectric substrate along a side surface of the insulation material layer;
• wherein
• the piezoelectric substrate and the insulation material layer define a hollow portion that accommodates the functional element;
• in a cross-sectional view in a direction perpendicular to a thickness direction of the piezoelectric substrate, the protective layer includes:
• a first portion above the hollow portion;
• a second portion adjacent to the first portion at one end of the second portion;
• and
• a third portion adjacent to the second portion at another end of the second portion;
• a direction parallel to the first main surface is a first direction in the cross-sectional view in the direction perpendicular to the thickness direction of the piezoelectric substrate;
• and
• a distance between an end portion of the piezoelectric substrate in the first direction and an outermost end portion of the protective layer in the first direction is greater than about half of a smallest dimension, in the first direction, of a portion of the connection electrode along the side surface of the insulation material layer.