Surface acoustic wave resonator device, manufacturing method therefore and filter

A manufacturing method for a surface acoustic wave resonator device, wherein the surface acoustic wave resonator device has a body region and a peripheral region, the peripheral region comprises a first peripheral region and a second peripheral region located at two opposite sides of the body region in a first direction,

• the manufacturing method comprises:
• providing a piezoelectric substrate;
• forming an interdigital transducer on a side of the piezoelectric substrate, wherein the interdigital transducer comprises a plurality of interdigital electrodes, a first interdigital electrode lead-out part and a second interdigital electrode lead-out part, and the plurality of interdigital electrodes comprise a first interdigital electrode and a second interdigital electrode;
• the first interdigital electrode and the second interdigital electrode extend along the first direction and are alternately arranged along a second direction intersecting with the first direction;
• wherein the first interdigital electrode is located in the body region and extends across the first peripheral region to be connected to the first interdigital electrode lead-out part, and the second interdigital electrode is located in the body region and extends across the second peripheral region to be connected to the second interdigital electrode lead-out part;
• and
• forming a clutter suppression structure on a side of the interdigital transducer away from the piezoelectric substrate, wherein the clutter suppression structure comprises a body structure and a sawtooth structure, wherein the body structure continuously extends along the second direction and overlaps with end portions of the plurality of interdigital electrodes close to the peripheral region in a third direction perpendicular to a main surface of the piezoelectric substrate;
• the sawtooth structure is disposed on a side of the body structure away from the body region in the first direction, and at least a portion of the sawtooth structure overlaps with the plurality of interdigital electrodes in the third direction.