Coded substrate material identifier communication tool

A method for building a database used by a machine learning (ML) and/or artificial intelligence (AI) module for processing substrates without knowing underlying substrate properties, comprising:

• associating a matrix identifier with a first substrate, wherein the matrix identifier corresponds to one or more substrate properties of the first substrate, wherein the matrix identifier comprises a matrix with a single row and a plurality of columns, and wherein each column represents a different context parameter;
• storing sensor data from the tool during processing of the first substrate in the database, wherein the sensor data is associated with the matrix identifier;
• modifying a recipe using the stored data;
• and
• processing subsequent substrates in a tool using the modified recipe.

A semiconductor processing tool, comprising:

• a host computer;
• an artificial intelligence (AI) and/or machine learning (ML) module communicatively coupled to the host computer;
• a database communicatively coupled to the AI and/or ML module;
• and
• a processing chamber, wherein the processing chamber is operated in accordance with a recipe that is selected by the host computer and modified by the AI and/or ML module in view of a data set within the database, wherein the host computer assigns a matrix identifier to the host computer selected recipe, and wherein the data set used by the AI and/or ML module is associated with the matrix identifier, wherein the matrix identifier comprises a matrix with a single row and a plurality of columns, and wherein each column represents a different context parameter.