Mirror, in particular for microlithography

A mirror having an optical effective surface and comprising:

• a mirror substrate;
• a reflection layer system configured to reflect electromagnetic radiation incident on the optical effective surface;
• at least one continuous piezoelectric layer arranged between the mirror substrate and the reflection layer system;
• a first electrode arrangement situated on a side of the piezoelectric layer facing the reflection layer system, and a second electrode arrangement situated on a side of the piezoelectric layer facing the mirror substrate, wherein the first electrode arrangement and the second electrode arrangement are arranged to apply an electric field to the piezoelectric layer that produces a locally variable deformation in the piezoelectric layer;
• and
• a mediator layer assigned to at least one of the electrode arrangements and configured to set an at least regionally continuous profile of the electrical potential along the respective electrode arrangement;
• wherein the electrode arrangement to which the mediator layer is assigned has a plurality of electrodes, each of which is configured to apply an electrical voltage relative to the respective other electrode arrangement;
• wherein the mediator layer is structured such that, in a region that couples two respective electrodes adjacent to one another, the mediator layer is subdivided into a plurality of regions that are electrically insulated from one another;
• and
• wherein the number of the regions that are electrically insulated from one another in the mediator layer is greater than the number of electrodes in the electrode arrangement to which the mediator layer is assigned by at least a factor of 2.