Vibration rectification error correction device, sensor module, and vibration rectification error correction method

A vibration rectification error correction device comprising:

• a reference signal generation circuit configured to output a reference signal;
• a first frequency delta-sigma modulation circuit configured to perform frequency delta-sigma modulation on the reference signal by using a first measured signal to generate a first frequency delta-sigma modulated signal;
• a first filter configured to:
• receive the first count value as the output signal of the first frequency delta-sigma modulation circuit;
• and
• filter the first count value in synchronization with the first measured signal to generate a second count value as an output signal of the first filter;
• a first timing control circuit configured to:
• receive the second count value, the reference signal, and the first measured signal;
• generate a first timing signal based on a reference count value of the number of pulses of the reference signal;
• and
• control a timing of outputting a second count value as an output signal in synchronization with the first timing signal;
• a first latch circuit configured to:
• latch the second count value as the output signal from the first timing control circuit;
• and
• hold the latched second count value as a third count value;
• and
• a second filter configured to:
• receive the third count value as an output signal of the first latch circuit;
• and
• filter the third count value in synchronization with the reference signal to generate a fourth count value as an output signal of the second filter.