Foreign matter inspection device
AssigneeHamamatsu Photonics K.K.
InventorsKunihiko Tsuchiya, Toshiyasu Suyama
Life of this patent
Estimating the term…
Abstract
A foreign matter inspection device includes: an X-ray application unit configured to apply an X-ray to an inspection object carried by a carriage unit; an X-ray detection unit configured to detect an X-ray transmitted by the inspection object and to output X-ray image data based on the detection result; an infrared ray application unit configured to apply an infrared ray to the inspection object carried by the carriage unit; and an infrared ray detection unit configured to detect the infrared ray from the inspection object and to output infrared image data based on the detection result. The infrared ray application unit and the infrared ray detection unit are covered by a protection unit formed of a member blocking the X-ray and transmitting the infrared ray.
Claims12
A foreign matter inspection device configured to inspect whether foreign matter is included in an inspection object, the foreign matter inspection device comprising:
- a carriage unit configured to carry the inspection object in a predetermined carrying direction;
- an X-ray application unit configured to apply X-rays to the inspection object carried by the carriage unit;
- an X-ray detection unit configured to detect X-rays transmitted by the inspection object and to output X-ray image data based on the detection result;
- an infrared ray application unit configured to apply infrared rays to the inspection object carried by the carriage unit;
- an infrared ray detection unit configured to detect infrared rays from the inspection object and to output infrared image data based on the detection result;
- a protection unit formed of a member blocking X-rays and transmitting infrared rays and configured to cover the infrared ray application unit and the infrared ray detection unit;
- and
- an image generating unit configured to generate an X-ray image of the inspection object based on the X-ray image data and to generate an infrared image of the inspection object based on the infrared image data,
- wherein a window formed of a member blocking X-rays and transmitting infrared rays is provided on a part located on an optical path of an infrared ray from the infrared ray application unit and an infrared ray from the inspection object of the protection unit.
Dependencies are inferred from the claim text.