Integrated connector between first and second vacuum pumps creating a vapor phase region environment

An exhausting system for exhausting a condensable gas, the exhausting system comprising:

• a first vacuum pump comprising a turbomolecular pump comprising turbomolecular blades;
• a second vacuum pump comprising a positive displacement pump comprising one or more rotating bodies;
• and
• a connecting portion defining a hole having one end at an outlet of the first vacuum pump and a second end at an inlet of the second vacuum pump;
• wherein:
• the first vacuum pump is positioned upstream of the second vacuum pump;
• the turbomolecular blades form a blade exhausting mechanism that exhausts the gas with a rotor blade and a stator blade and the turbomolecular pump is structured so as not to have a drag pump mechanism;
• the first vacuum pump has a rotor that rotates independently of all of the one or more rotating bodies of the second vacuum pump;
• the first vacuum pump, the second vacuum pump and the connecting portion are connected and integrated by using bolts;
• and
• the connecting portion and the second vacuum pump are installed at a position relative to the first vacuum pump to provide a straight path for the condensable gas from at least one of the rotor blade and the stator blade to the inlet of the second vacuum pump.