Curable composition, film forming method and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYuto Ito, Toshiki Ito, Isao Kawata, Fen Wan, Timothy Stachowiak, Weijun Liu
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AssigneeCanon Kabushiki Kaisha
InventorsYuto Ito, Toshiki Ito, Isao Kawata, Fen Wan, Timothy Stachowiak, Weijun Liu
Estimating the term…
A curable composition containing a polymerizable compound (a), a photopolymerization initiator (b), and a solvent (c), wherein the curable composition has viscosity of not less than 2 mPa·s and not more than 60 mPa·s at 23° C., a content of the solvent (d) with respect to the whole curable composition is not less than 5 vol % and not more than 95 vol %, a boiling point of the solvent (d) at normal pressure is less than 250° C., and the polymerizable compound (a) contains a compound (a-1) containing not less than one aromatic ring or aromatic heterocycle, and not less than four vinyl groups directly bonding to the aromatic ring or the aromatic heterocycle.
A curable composition containing:
A curable composition containing:
A film forming method of forming a film of a curable composition in a space between a mold and a substrate, comprising:
Dependencies are inferred from the claim text.