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US 12,275,636 B2Granted
Method for determining a torsion angle of a mirror body of an MEMS apparatus
AssigneeInfineon Technologies AG
InventorFranz Michael Darrer
Life of this patent
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Abstract
A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.
Claims21
A method, comprising:
- applying one or more driver voltages to one or more electrostatic comb drives of an MEMS apparatus, based on:
- applying a first driver voltage to a first stator of the comb drive;
- and
- applying a second driver voltage to a second stator of the comb drive;
- overlaying the one or more driver voltages with one or more periodic voltage signals, based on:
- overlaying the first driver voltage with a first periodic voltage signal;
- and
- overlaying the second driver voltage with a second periodic voltage signal;
- determining a measurement signal at a rotor of the one or more comb drives, wherein the measurement signal is based on the first periodic voltage signal and the second periodic voltage signal;
- and
- determining a torsion angle of a mirror body of the MEMS apparatus based on the one or more periodic voltage signals.
8 more elements
An MEMS apparatus, comprising:
- a mirror body;
- one or more electrostatic comb drives for twisting the mirror body based on one or more driver voltages,
- wherein a first driver voltage is applied to a first stator of the comb drives, and
- wherein a second driver voltage is applied to a second stator of the comb drives;
- a unit for overlaying the one or more driver voltages with one or more periodic voltage signals,
- wherein the first driver voltage is overlaid with a first periodic voltage signal, and
- wherein the second driver voltage is overlaid with a second periodic voltage signal;
- a first unit for determining a measurement signal at a rotor of the one or more comb drives, wherein the measurement signal is based on the one or more periodic voltage signals;
- and
- a second unit for determining a torsion angle of the mirror body based on the one or more periodic voltage signals.
7 more elements
Dependencies are inferred from the claim text.