Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus

Abstract

A piezoelectric device includes a diaphragm provided on a side of one surface of a substrate and a piezoelectric actuator having a first electrode, a piezoelectric body layer, and a second electrode which are stacked on a side of a surface opposite to the substrate of the diaphragm, in which the piezoelectric actuator includes an active portion in which the piezoelectric body layer is pinched between the first electrode and the second electrode, and has an uneven portion constituted with a plurality of projection portions and a recess portion formed between the projection portions on a surface of the first electrode on a side of the piezoelectric body layer at an end portion of the active portion.

Dependencies are inferred from the claim text.