Piezoelectric actuating apparatus
AssigneeCoretronic MEMS Corporation
InventorsHao-Chien Cheng, Wei-Leun Fang, Kai-Chih Liang, Ming-Ching Wu
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AssigneeCoretronic MEMS Corporation
InventorsHao-Chien Cheng, Wei-Leun Fang, Kai-Chih Liang, Ming-Ching Wu
Estimating the term…
A piezoelectric actuating apparatus including a frame, a rotatable element, an actuating structure, and a sensing structure is provided. The rotatable element is disposed in an accommodating opening and connected to the frame through a rotating shaft structure. The rotatable element is configured to reciprocatingly swing relative to the frame with an axis of the rotating shaft structure. The actuating structure is elastically coupled to the rotatable element through at least one first elastic component. The sensing structure is elastically coupled to the rotatable element through at least one second elastic component. The actuating structure is deformed by receiving a driving signal, and drives the rotatable element to rotate around the axis through the at least one first elastic component. The rotating rotatable element is linked to the sensing structure through the at least one second elastic component to be correspondingly deformed, and outputs a sensing signal.
A piezoelectric actuating apparatus, comprising a frame, a rotatable element, an actuating structure, and a sensing structure, wherein
A piezoelectric actuating apparatus, comprising a frame, a rotatable element, an actuating structure, and a sensing structure, wherein
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