Electronic device manufacturing system
AssigneeApplied Materials, Inc.
InventorsMichael Robert Rice, Jeffrey C. Hudgens
Life of this patent
Estimating the term…
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AssigneeApplied Materials, Inc.
InventorsMichael Robert Rice, Jeffrey C. Hudgens
Estimating the term…
An electronic device manufacturing system includes a mainframe including a transfer chamber and facets defining side walls of the transfer chamber. The facets include first facet, second facet, third facet, and fourth facet that form the transfer chamber. The first facet has a first number of substrate access ports. The second facet has a second number of substrate access ports. A first substrate access port of the first facet has a first side dimension and a second substrate access port of the second facet has a second side dimension that is different from the first side dimension. The second facet is adjacent to the first facet. The third facet is adjacent to the second facet. The fourth facet has the second number of substrate access ports. The second number of substrate access ports is different than the first number of substrate access ports.
An electronic device manufacturing system comprising:
An electronic device manufacturing system comprising:
Dependencies are inferred from the claim text.