System for dispensing spin-on glass (SOG) and method of using
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorYung-Tsun Liu
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Abstract
A method of manufacturing a semiconductor device includes detecting, using a sensor, liquid spin on glass (SOG) outside of a dispenser nozzle in an abnormal length relative to the dispenser nozzle. The method further includes adjusting, using a controller, a suck back (SB) valve to withdraw liquid SOG from the abnormal length. The method further includes comparing a sensed amount of liquid SOG deposited onto the semiconductor wafer from the dispenser nozzle with at least one set operating parameter. The method further includes pausing sensing of a duration of dispensing liquid SOG onto the semiconductor wafer based on the sensed amount of liquid SOG deposited being outside the at least one operating parameter.
Claims20
A method of manufacturing a semiconductor device, comprising:
- dispensing liquid spin on glass (SOG) from a dispenser nozzle, wherein dispensing the liquid SOG comprises dispensing the liquid SOG from a suck back (SB) valve, and the SB valve comprises:
- a switch valve configured to permit the liquid SOG to flow from a SOG supply toward the dispenser nozzle, and
- an adjustment valve configured to force the liquid SOG toward the dispenser nozzle in response to closing the adjustment valve, wherein the adjustment valve is downstream from the switch valve;
- ceasing dispensing liquid SOG from the dispenser nozzle;
- detecting, using a sensor, the liquid SOG outside of the dispenser nozzle in an abnormal length relative to the dispenser nozzle;
- adjusting, using a controller, the SB valve to withdraw liquid SOG from the abnormal length, wherein adjusting the SB valve comprises closing the switch valve and opening the adjustment valve;
- comparing a sensed amount of liquid SOG outside of the dispenser nozzle, but still connected to the dispenser nozzle, with at least one set operating parameter;
- and
- pausing sensing of liquid SOG outside of the dispensing nozzle for a duration based on the sensed amount of liquid SOG being outside the at least one operating parameter.
A method of manufacturing a semiconductor device, the method comprising:
- dispensing liquid spin on glass (SOG) from a dispenser nozzle, wherein dispensing the liquid SOG comprises dispensing the liquid SOG from a suck back (SB) valve, and the SB valve comprises:
- a switch valve configured to permit the liquid SOG to flow from a SOG supply toward the dispenser nozzle, and
- an adjustment valve configured to force the liquid SOG toward the dispenser nozzle in response to closing the adjustment valve, wherein the adjustment valve is downstream from the switch valve;
- ceasing dispensing liquid SOG from the dispenser nozzle;
- detecting, using a sensor, the liquid SOG outside of the dispenser nozzle;
- determining, using a controller, whether the liquid SOG outside of the dispensing nozzle is outside of at least one operating parameter;
- withdrawing the liquid SOG from outside the dispensing nozzle in response to a determination that the liquid SOG outside of the dispensing nozzle, but still connected to the dispensing nozzle, is outside of at least one operating parameter, wherein withdrawing the liquid SOG comprises closing the switch valve and opening the adjustment valve;
- and
- pausing sensing of the liquid SOG outside the dispensing nozzle in response to the determination that the liquid SOG outside the dispensing nozzle is outside the at least one operating parameter.
A method of manufacturing a semiconductor device, the method comprising:
- dispensing liquid spin on glass (SOG) from a dispenser nozzle, wherein dispensing the liquid SOG comprises dispensing the liquid SOG from a suck back (SB) valve, and the SB valve comprises:
- a switch valve configured to permit the liquid SOG to flow from a SOG supply toward the dispenser nozzle, and
- an adjustment valve configured to force the liquid SOG toward the dispenser nozzle in response to closing the adjustment valve, wherein the adjustment valve is downstream from the switch valve;
- ceasing dispensing liquid SOG from the dispenser nozzle;
- detecting, using an optical sensor, the liquid SOG outside of the dispenser nozzle;
- determining, using a controller, whether the liquid SOG outside of the dispensing nozzle is outside of at least one operating parameter;
- withdrawing the liquid SOG from outside the dispensing nozzle into the adjustment valve in response to a determination that the liquid SOG outside of the dispensing nozzle, but still connected to the dispensing nozzle, is outside of at least one operating parameter, wherein the withdrawing of the SOG outside the dispensing nozzle comprises:
- closing a switch valve;
- and
- opening an adjustment valve, wherein the adjustment valve is between the switch valve and the dispensing nozzle;
- and
- pausing sensing of the liquid SOG outside the dispensing nozzle in response to the determination that the liquid SOG outside the dispensing nozzle is outside the at least one operating parameter.
Dependencies are inferred from the claim text.