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US 12,272,534 B2Granted
Plasma viewport
AssigneeLam Researh Corporation
InventorsBin Luo, Andrew H. Breninger, John Michael Wiltse, Brian Lewis Ratliff, David James Shusteric
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Abstract
Plasma viewports for high-temperature environments in semiconductor processing equipment are disclosed; such viewports may use a triple-window design, with each window providing particular functionality.
Claims19
An apparatus comprising:
- a frame defining an aperture that extends between an interior side and an exterior side;
- a first window sealed against the frame, sized larger than the aperture, and completely overlapping the aperture when viewed along a direction perpendicular to a largest surface of the first window;
- a glass window;
- and
- a polymeric window sized larger than the aperture, completely overlapping the aperture when viewed along a direction perpendicular to a largest surface of the polymeric window, and secured to the exterior side of the frame, wherein:
- the first window is positioned closer to the interior side of the frame than the polymeric window,
- the glass window is interposed between the first window and the polymeric window,
- the first window is made of a fluorine-resistant, high-temperature stable material that has optical transmissivity of 80% in at least 80% of the visual light spectrum, and
- the frame supports the first window, the glass window, and the polymeric window in a spaced-apart configuration.
6 more elements
A semiconductor processing tool comprising:
- a semiconductor processing chamber, the semiconductor processing chamber having an exterior wall;
- a radio-frequency (RF) generator;
- an RF electrode located within the semiconductor processing chamber;
- and
- a plasma viewport, the plasma viewport having:
- a frame defining an aperture that extends between an interior side and an exterior side;
- a first window sealed against the frame, sized larger than the aperture, and completely overlapping the aperture when viewed along a direction perpendicular to a largest surface of the first window;
- a glass window;
- and
- a polymeric window sized larger than the aperture, completely overlapping the aperture when viewed along a direction perpendicular to a largest surface of the polymeric window, and secured to the exterior side of the frame, wherein:
- the first window is positioned closer to the interior side of the frame than the polymeric window, such that the first window is interposed between the processing chamber and the glass window;
- the glass window is interposed between the first window and the polymeric window,
- the first window is made of a fluorine-resistant, high-temperature stable material that has optical transmissivity of 80% in at least 80% of the visual light spectrum, and
- the frame supports the first window, the glass window, and the polymeric window in a spaced-apart configuration.
11 more elements
Dependencies are inferred from the claim text.