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US 12,272,533 B2Granted
Assessment of matching networks
AssigneeAdvanced Energy Industries, Inc.
InventorsCorneluis Erasmus van Greunen, Masahiro Watanabe
Life of this patent
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Abstract
Systems and methods for operating a match network are disclosed. One match network comprises at least one first sensor to measure one or more first parameters and at least one second sensor to measure one or more second parameters. The match network also comprises means for assessing whether the match is operating as expected or operating outside of specifications using the one or more first-parameter measurements; the one or more second-parameter measurements; a setting of the match; or one or more expected parameter values.
Claims19
A system for assessing a match network, the system comprising:
- non-volatile memory comprising a stored model that characterizes a variable reactance section of the match network in terms of s-parameters for each combination of, at least, a portion of available combinations of settings of switched capacitors;
- and
- a controller comprising:
- a reactance controller configured to control the setting of the switched capacitors;
- and
- a damage detection component configured to:
- obtain a present setting of the variable reactance section from the reactance controller;
- access s-parameters of the stored model for the present setting;
- obtain, using the s-parameters and at least one measurement-based-attribute at a first side of the match network, at least one expected-attribute at a second side of the match network;
- and
- contrast the at least one measurement-based-attribute at the second side of the match network with the at least one expected-attribute to assess whether the match network is damaged.
8 more elements
A match system comprising:
- a variable reactance section comprising a plurality of switched capacitors;
- at least one first sensor to measure one or more first parameter values at a first side of the variable reactance section;
- at least one second sensor to measure one or more second parameter values at a second side of the variable reactance section;
- non-volatile memory comprising a stored model that characterizes the variable reactance section in terms of s-parameters for each combination of, at least, a portion of available combinations of settings of the switched capacitors;
- and
- a controller comprising:
- a reactance controller configured to control a setting of the variable reactance section;
- a damage detection component configured to:
- obtain a present setting of the variable reactance section from the reactance controller;
- access s-parameters of the stored model for the present setting;
- obtain, using the s-parameters and one or more of the first parameter values measured at the first side of the variable reactance section, at least one expected parameter value for the second side of the variable reactance section;
- and
- contrast the one or more second parameters values with the at least one expected parameter value to assess whether the match system is damaged.
10 more elements
A match system comprising:
- a variable reactance section comprising a plurality of switched capacitors;
- a first sensor to measure one or more first-parameters at a first side of the match system;
- a second sensor to measure one or more second parameters at a second side of the match system;
- a non-transitory computer-readable medium comprising:
- a model that characterizes the variable reactance section in terms of s-parameters for each combination of, at least, a portion of available combinations of settings of the switched capacitors;
- and
- instructions stored thereon, for execution by a processor, the instructions including instructions to:
- to create a reactance controller to control a setting of the match system;
- measure one or more parameters at the first sensor to obtain at least one measurement-based-attribute at the first side of the match system;
- measure one or more parameters at the second sensor to obtain at least one measurement-based-attribute at the second side of the match system;
- obtain a present setting of the variable reactance section from the reactance controller;
- accessing s-parameters of the stored model for the present setting;
- obtain, using the s-parameters and the at least one measurement-based-attribute at the first side of the match system, at least one-expected-attribute at the second side of the match system;
- and
- contrast the at least one measurement-based-attribute at the second side of the match system with the at least one expected-attribute to assess operational changes of the match system.
12 more elements
Dependencies are inferred from the claim text.