Composite substrates for saw tags or RFID and sensors applications
AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche
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AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche
Estimating the term…
A surface acoustic wave tag device is disclosed, comprising: an acoustic wave propagating substrate, at least one transducer structure comprising inter-digitated comb electrodes, and at least one reflecting means, the reflecting means comprising at least one reflector, wherein the acoustic wave propagation substrate is a composite substrate comprising a base substrate and a piezoelectric layer, wherein the crystallographic orientation of the piezoelectric layer with respect to the base substrate is such that the propagation of a shear wave inside the piezoelectric layer and in the direction of propagation corresponding to the acoustic wave is enabled. A physical quantity determining device and a fabrication method of such surface acoustic wave tag device are also disclosed.
A surface acoustic wave tag device, comprising:
A physical quantity-determining device comprising two or more surface acoustic wave tag devices, at least one of the two or more surface acoustic wave tag devices comprising:
Dependencies are inferred from the claim text.