Apparatus for positioning and clamped curing
AssigneeASML Netherlands B.V.
InventorsMartin Dieter Nico Peters, Marcellus Antonius De Folter
Life of this patent
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Abstract
An apparatus including: a first gripping member having a first magnetic element and moveable between a first position and a second position; a first biasing member configured to bias the first gripping member toward the first position; and a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position.
Claims20
An apparatus to grip an object, the apparatus comprising:
- a first gripping member comprising a first magnetic element and moveable between a first position of the first gripping member and a second position of the first gripping member;
- a first biasing member configured to bias the first gripping member toward the first position of the first gripping member;
- and
- a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position of the first gripping member, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position of the first gripping member,
- wherein the second position corresponds to a gripping condition,
- wherein the first gripping member pivots in movement between the first and second positions, and
- wherein an imaginary line or arc of the movement passes both through a surface of the first gripping member arranged to contact the object and through the first magnetic element, the second magnetic element, or both the first and second magnetic elements.
An apparatus to grip an object, the apparatus comprising:
- a first gripping member comprising a first magnetic element and moveable between a first position of the first gripping member and a second position of the first gripping member;
- a first biasing member configured to bias the first gripping member toward the first position of the first gripping member;
- and
- a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and cause a movement of the first gripping member to the second position of the first gripping member, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position of the first gripping member,
- wherein none of the surfaces of the first gripping member, first magnetic element, first biasing member and second magnetic element rub against any surfaces during operation except for contact between the first gripping member and the object, and
- wherein an imaginary line or arc of the movement passes both through a surface of the first gripping member arranged to contact the object and through the first magnetic element, the second magnetic element, or both the first and second magnetic elements.
An apparatus to grip an object, the apparatus comprising:
- a first gripping member comprising a first magnetic element and moveable between a first position of the first gripping member and a second position of the first gripping member;
- a first biasing member configured to bias the first gripping member toward the first position of the first gripping member, the first biasing member being a cantilevered leaf spring with a gripping element on a free portion of the cantilevered leaf spring;
- and
- a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and cause a movement of the first gripping member to the second position of the first gripping member, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position of the first gripping member,
- wherein an imaginary line or arc of the movement passes both through a surface of the gripping element arranged to contact the object and through the first magnetic element, the second magnetic element, or both the first and second magnetic elements.
Dependencies are inferred from the claim text.