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US 12,271,013 B2Granted
Optical filter
AssigneeViavi Solutions Inc.
InventorsWilliam D. Houck, Charles Andrew Hulse
Life of this patent
Estimating the term…
Abstract
An optical filter includes a first mirror that has a first uniform thickness, a second mirror that has a second uniform thickness, and a spacer that is positioned between the first mirror and the second mirror. The spacer has a variable thickness along a first axis of the optical filter. In some implementations, a thickness profile of the spacer, along the first axis, includes one or more portions that have a non-linear slope with an absolute value that is greater than zero.
Claims21
An optical filter, comprising:
- a first mirror that has a first uniform thickness;
- a second mirror that has a second uniform thickness;
- and
- a spacer that is positioned between the first mirror and the second mirror, wherein:
- the spacer has a variable thickness along a first axis of the optical filter,
- a first edge of the spacer has a minimum thickness of the variable thickness along the first axis of the optical filter,
- a second edge of the spacer has a maximum thickness of the variable thickness along the first axis of the optical filter,
- a thickness profile of the spacer, along the first axis, has a slope with an absolute value that is greater than zero,
- the variable thickness increases continuously along the slope and from the first edge to the second edge, and
- a variation in center wavelength, across a region of the optical filter that is parallel to a second axis of the optical filter, is less than a variation defined as
- D
- ×
- R
- ×
- (
- 1
- -
- 1
- -
- 〚
- (
- W
- 2
- /
- R
- )
- 〛
- 2
- )
- ,
- wherein the D is the slope,
- wherein the W is a filter width, and
- wherein the R is a length of a coating tool arm.
30 more elements
A wafer, comprising:
- a plurality of optical filters,
- wherein an optical filter, of the plurality of optical filters, includes:
- a first mirror that has a first uniform thickness;
- a second mirror that has a second uniform thickness;
- and
- a spacer that is positioned between the first mirror and the second mirror,
- the spacer having a variable thickness along a first axis of the optical filter,
- one or more of:
- a first edge of the spacer having a minimum thickness of the variable thickness along the first axis of the optical filter, or
- a second edge of the spacer having a maximum thickness of the variable thickness along the first axis of the optical filter,
- the variable thickness increasing continuously along a slope of the spacer that one or more of begins at the first edge or ends at the second edge, and
- a variation in center wavelength, across a region of the optical filter that is parallel to a second axis of the optical filter, being less than a variation defined as
- D
- ×
- R
- ×
- (
- 1
- -
- 1
- -
- 〚
- (
- W
- 2
- /
- R
- )
- 〛
- 2
- )
- ,
- wherein the D is the slope,
- wherein the W is a filter width, and
- wherein the R is a length of a coating tool arm.
32 more elements
An optical filter, comprising:
- a first mirror;
- a second mirror;
- and
- a spacer that is positioned between the first mirror and the second mirror, wherein:
- the spacer has a variable thickness along a first axis of the optical filter, and one or more of:
- a first edge of the spacer having a minimum thickness of the variable thickness along the first axis of the optical filter, or
- a second edge of the spacer having a maximum thickness of the variable thickness along the first axis of the optical filter,
- the variable thickness increasing continuously along slope of the spacer towards one or more of the first edge or the second edge, and
- a variation in center wavelength, across a region of the optical filter that is parallel to a second axis of the optical filter, is less than a variation defined as
- D
- ×
- R
- ×
- (
- 1
- -
- 1
- -
- 〚
- (
- W
- 2
- /
- R
- )
- 〛
- 2
- )
- ,
- wherein the D is the slope,
- wherein the W is a filter width, and
- wherein the R is a length of a coating tool arm.
29 more elements
Dependencies are inferred from the claim text.