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AssigneeASML Netherlands B.V.
InventorsAndrey Nikipelov, Marcus Adrianus Van De Kerkhof, Pieter-Jan Van Zwol, Laurentius Cornelius De Winter, Wouter Joep Engelen, Alexey Olegovich Polyakov
Estimating the term…
A first diffusor configured to receive and transmit radiation has a plurality of layers, each layer arranged to change an angular distribution of EUV radiation passing through it differently. A second diffusor configured to receive and transmit radiation has a first layer and a second layer. The first layer is formed from a first material, the first layer including a nanostructure on at least one surface of the first layer. The second layer is formed from a second material adjacent to the at least one surface of the first layer such that the second layer also includes a nanostructure. The second material has a refractive index that is different to a refractive index of the first layer. The diffusors may be configured to receive and transmit EUV radiation.
A diffusor configured to receive and transmit EUV radiation, the diffusor comprising a plurality of layers, each layer arranged to change an angular distribution of the EUV radiation passing through it differently than another layer of the plurality of layers, wherein each of at least two of the plurality of layers cause angular dispersion of EUV radiation passing through it in a predominant scattering direction in a plane of the diffusor, the predominant scattering directions of the at least two layers being different.
A diffusor configured to receive and transmit EUV radiation, the diffusor comprising:
A diffusor configured to receive and transmit EUV radiation, the diffusor comprising:
Dependencies are inferred from the claim text.