Active bimodal AFM operation for measurements of optical interaction
AssigneeAttocube Systems AG
InventorsAlexander A. Govyadinov, Florian Huth, Ivan Malovichko, Marcus Diem
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Abstract
The present invention relates to a method for measuring the dielectric properties of a sample with a scanning probe microscope. In particular, the invention relates to highly-localized optical imaging and spectroscopy on a sample surface using an atomic force microscope (AFM) probe mechanically driven at two oscillation frequencies, referred to herein as “active bimodal operation”, and a modulated source of electromagnetic radiation.
Claims17
Method for measuring dielectric properties of a sample with a scanning probe microscope comprising an oscillating cantilever probe, a sample and a source of electromagnetic radiation, which method comprises the steps of
- a) inducing oscillations of the cantilever at at least two frequencies f1 and f2, wherein f1 is within a full width of a first mechanical oscillation resonance frequency fC1 of the cantilever and f2 is within a full width of a second mechanical oscillation resonance frequency fC2 of the cantilever;
- b) interacting the probe with the sample;
- c) illuminating the probe or a region of the sample, including an area of contact with the probe, with the electromagnetic radiation at a modulation frequency fm;
- and
- d) measuring a change in the mechanical oscillation resonance frequencies of the cantilever fC1 or fC2, due to the modulated radiation at the modulation frequency fm, in order to determine dielectric properties of the sample.
Method for measuring dielectric properties of a sample with a scanning probe microscope comprising an oscillating cantilever probe, a sample and a source of electromagnetic radiation, which method comprises the steps of
- a) inducing oscillations of the cantilever at at least one frequency f1 that is within a full width of a first mechanical oscillation resonance frequency fC1 of the cantilever;
- b) interacting the probe with the sample;
- c) illuminating the probe or a region of the sample, including an area of contact with the probe, with the electromagnetic radiation at a modulation frequency fm;
- and
- d) measuring a change in a second mechanical oscillation resonance frequency fC2 of the cantilever, due to the modulated radiation at the modulation frequency fm, in order to determine the dielectric properties of the sample,
- wherein the cantilever exhibits oscillation resonance frequencies fC1 and fC2 such that at least for one integer n, the frequency n*fC1 falls within a full width of the second mechanical oscillation resonance frequency fC2.
Method for measuring dielectric properties of a sample with a scanning probe microscope comprising an oscillating tuning fork probe, a sample and a source of electromagnetic radiation, which method comprises the steps of
- e) inducing oscillations of the tuning fork at at least two frequencies f1 and f2, wherein f1 is within a full width of a first mechanical oscillation resonance frequency fC1 of the tuning fork and f2 is within a full width of a second mechanical oscillation resonance frequency fC2 of the tuning fork;
- f) interacting the probe with the sample;
- g) illuminating the probe or a region of the sample, including an area of contact with the probe, with the electromagnetic radiation at a modulation frequency fm;
- and
- h) measuring a change in the mechanical oscillation resonance frequencies of the tuning fork fC1 or fC2, due to the modulated radiation at the modulation frequency fm, in order to determine dielectric properties of the sample.
Method for measuring dielectric properties of a sample with a scanning probe microscope comprising an oscillating tuning fork probe, a sample and a source of electromagnetic radiation, which method comprises the steps of
- a) inducing oscillations of the tuning fork at least one frequency f1 that is within a full width of a first mechanical oscillation resonance frequency fC1 of the tuning fork;
- b) interacting the probe with the sample;
- c) illuminating the probe or a region of the sample, including an area of contact with the probe, with the electromagnetic radiation at a modulation frequency fm;
- and
- d) measuring a change in a second mechanical oscillation resonance frequency fC2 of the tuning fork, due to the modulated radiation at the modulation frequency fm, in order to determine dielectric properties of the sample,
- wherein the tuning fork exhibits oscillation resonance frequencies fC1 and fC2 such that at least for one integer n, the frequency n*fC1 falls within a full width of the second mechanical oscillation resonance frequency fC2.
Dependencies are inferred from the claim text.