4-points phase and sensitivity estimation algorithm and related architecture

A system, comprising:

• processing circuitry configured to:
• impart a drive signal to one or more drive electrodes of a microelectromechanical system (MEMS) sensor, the drive signal having a drive frequency;
• apply a plurality of test signals to a proof mass sense signal to create a modified proof mass sense signal, wherein the plurality of test signals comprises a plurality of frequencies, each of the plurality of frequencies different from the drive frequency;
• drive a gyroscope of the MEMS sensor based on the modified proof mass sense signal, thereby injecting the plurality of test signals into a proof mass output sense signal;
• receive the proof mass output sense signal from the MEMS sensor;
• extract an in-phase component and a quadrature component from the proof mass output sense signal;
• process the in-phase component and the quadrature component based on the plurality of frequencies of the plurality of test signals;
• and
• determine a change in demodulation phase based on the processing of the in-phase component and the quadrature component.

A gyroscope, comprising:

• test signal generation circuitry;
• a drive mass;
• a proof mass;
• and
• processing circuitry configured to:
• impart a drive signal to one or more drive electrodes of a microelectromechanical system (MEMS) sensor, the drive signal having a drive frequency;
• apply a plurality of test signals to a proof mass sense signal to create a modified proof mass sense signal, wherein the plurality of test signals comprises a plurality of frequencies, each of the plurality of frequencies different from the drive frequency;
• drive the proof mass of the MEMS sensor based on the modified proof mass sense signal, thereby injecting the plurality of test signals into a proof mass output sense signal;
• receive the proof mass output sense signal from the MEMS sensor;
• extract an in-phase component and a quadrature component from the proof mass output sense signal;
• process the in-phase component and the quadrature component based on the plurality of frequencies of the plurality of test signals;
• and
• determine a change in demodulation phase based on the processing of the in-phase component and the quadrature component.