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US 12,270,316 B2Granted
Blade, processing system and processing method
AssigneeNikon Corporation
InventorShinji Sato
Life of this patent
Estimating the term…
Abstract
A blade is used in fluid and includes: a base member; and a coat layer that is formed on the base member, a plurality of first grooves and a plurality of second grooves are formed on a surface of the coat layer, a pitch of the plurality of first grooves is different from a pitch of the plurality of second grooves.
Claims20
A blade for use in fluid, the blade comprising:
- a base member;
- and
- a coat layer that is formed on the base member, wherein
- a plurality of first grooves, each of which has a first depth, and a plurality of second grooves, each of which has a second depth that is larger than the first depth, are formed on a surface of the coat layer,
- a pitch of the plurality of first grooves is smaller than a pitch of the plurality of second grooves,
- the plurality of first grooves include a groove configured to reduce a resistance of the coat layer to fluid, and
- a direction along which at least one of the plurality of second grooves extends along the surface of the coat layer is different from a direction along which at least one of the plurality of first grooves extends along the surface of the coat layer.
4 more elements
A blade for use in fluid, the blade comprising:
- a base member;
- and
- a coat layer that is formed on the base member, wherein
- a plurality of first grooves, each of which has a first depth, and a plurality of second grooves, each of which has a second depth that is larger than the first depth, are formed on a surface of the coat layer,
- a pitch of the plurality of first grooves is smaller than a pitch of the plurality of second grooves,
- the plurality of first grooves include a groove configured to reduce a resistance of the coat layer to fluid,
- at least one of the plurality of second grooves extends along a first direction that is along the surface of the coat layer,
- at least another one of the plurality of second grooves extends along a second direction that is along the surface of the coat layer and that intersects with the first direction, and
- at least one of the plurality of first grooves extends along either one of the first direction and the second direction.
6 more elements
A blade for use in fluid, the blade comprising:
- a base member;
- and
- a coat layer that is formed on the base member, wherein
- a plurality of first grooves, each of which has a first depth, and a plurality of second grooves, each of which has a second depth that is larger than the first depth, are formed on a surface of the coat layer,
- a pitch of the plurality of first grooves is smaller than a pitch of the plurality of second grooves,
- the plurality of first grooves include a groove configured to reduce a resistance of the coat layer to fluid,
- the surface of the coat layer is divided into a plurality of areas by the plurality of second grooves, and
- a characteristic of a first groove of the plurality of first grooves formed in a first area of the plurality of areas is different from a characteristic of another first groove of the plurality of first grooves formed in a second area, which is different from the first area, of the plurality of areas,
- wherein the characteristic of the first groove and the characteristic of the other first groove each include at least one of a depth, a width, a pitch and an extending direction.
6 more elements
Dependencies are inferred from the claim text.