Spherical inorganic particles having surface bumps formed thereon, and method of manufacturing same
AssigneesBead Origin Inc., Research & Business Foundation Sungkyunkwan University
InventorsJae-Do Nam, Na-Yeon Kim, In-Kyung Park, Uiseouk Hwang, Donghak Kim
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Abstract
The inorganic particle according to the present invention is composed of aggregation of crystalline and amorphous small particles and has a spherical and smooth surface. The spherical appearance, low crystallinity and narrow particle size distribution of inorganic particle are more advantageous in reducing scratch defects in the CMP process. In addition, since the small particles on the surface of the inorganic particle provide more active sites, the inorganic particle has an excellent removal rate, so it is advantageous as a next-generation CMP abrasive.
Claims12
An inorganic particle formed by aggregation of a plurality of small particles, wherein the small particle has a mixed phase of a crystalline phase and an amorphous phase and has a degree of crystallinity of 90% or less, wherein the small particle has a particle diameter of 10 nm or less, wherein the inorganic particle is CeO2 particle, and wherein the ratio of Ce3+/Ce4+is 40 to 60.
Dependencies are inferred from the claim text.