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AssigneesWaseda University, Meijo Nano Carbon Co., Ltd.
InventorsSuguru Noda, Katsuya Namiki, Zihao Zhang, Toshio Osawa, Hisashi Sugime
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Provided are a carbon nanotube production device and production method capable of realizing high-temperature heating of a catalyst raw material in a floating catalyst chemical vapor deposition (FCCVD) method, and improving the quality and yield of carbon nanotubes synthesized. A carbon nanotube production device 1 includes a synthesis furnace 2 for synthesizing carbon nanotubes; a catalyst raw material supplying nozzle 3 for supplying a catalyst raw material used to synthesize carbon nanotubes to the synthesis furnace 2; and a nozzle temperature adjusting unit 6 capable of setting a temperature of an inner portion 4 of the catalyst raw material supplying nozzle 3 higher than a temperature of a reaction field 5 of the synthesis furnace 2. By supplying to the synthesis furnace 2 the catalyst raw material that has been thermally decomposed after being heated to a temperate at which a catalyst metal will not yet be condensed, and by having the thermally decomposed catalyst raw material rapidly cooled to a CVD temperature at the synthesis furnace 2, microscopic catalyst metal particles will be generated at a high density in the space of the reaction field 5 such that carbon nanotubes having a small diameter can be vapor-grown at a high density.
A carbon nanotube production device comprising:
A carbon nanotube production method comprising:
A carbon nanotube production device comprising:
A carbon nanotube production method comprising:
Dependencies are inferred from the claim text.