Ceramic heater and method of manufacturing the same
AssigneeNGK Insulators, Ltd.
InventorsKazuhiro Nobori, Takuji Kimura, Shuichiro Motoyama
Life of this patent
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Abstract
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.
Claims10
A ceramic heater comprising:
- a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded;
- a ceramic tubular shaft with an upper end bonded to a lower surface of the plate;
- and
- a power feeding member which penetrates a peripheral wall part of the tubular shaft in a vertical direction, and is electrically connected to the heating resistor,
- wherein the power feeding member is embedded in the peripheral wall part of the tubular shaft, and is in tight contact with a ceramic material of the tubular shaft, and
- wherein the heating resistor is electrically connected through a cylindrical connection terminal to the power feeding member and a lower end surface of the cylindrical connection terminal is flush with the lower surface of the plate.
A method of manufacturing a ceramic heater, the method comprising:
- (a) a step of obtaining a tubular molded body by placing a second mold cast molded body at an outer surface of a first mold cast molded body for producing an inner wall of a ceramic tubular shaft with a power feeding member arranged in a vertical direction on the outer surface of the first mold cast molded body, the second mold cast molded body for producing an outer wall of the tubular shaft;
- (b) a step of obtaining the tubular shaft by calcining the tubular molded body;
- (c) a step of preparing a ceramic plate in which a heating resistor is embedded, wherein cylindrical connection terminals respectively in contact with both ends of the heating resistor are exposed from a lower bonding surface of the plate and are flush with the lower bonding surface of the plate;
- and
- (d) a step of bonding the plate and the tubular shaft by heating the plate and the tubular shaft while pressing the tubular shaft against the plate in a state where the power feeding member is exposed to a bonding surface of the tubular shaft, a metal bonding material is placed between the power feeding member and the cylindrical connection terminal of the plate, and a ceramic bonding material is placed between the bonding surface of the tubular shaft and the bonding surface of the plate.
Dependencies are inferred from the claim text.