Resonance device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYoshihisa Inoue, Ville Kaajakari, Ryota Kawai
Life of this patent
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Abstract
A resonance device is provided that includes a resonator having a base, a vibrating arm extending from one end of the base along a first direction, a frame disposed around at least a part of the vibrating arm and holding the vibrating arm such that the vibrating arm is configured to vibrate, and a support arm connecting the base to the frame. Moreover, a first substrate is provided that includes a first recess forming at least a part of a vibration space for the resonator and a first limiting portion provided away from the support arm by a first distance in a thickness direction, in which the first distance is smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate.
Claims19
A resonance device comprising:
- a resonator including:
- a base,
- a vibrating arm extending from a first end of the base in a first direction,
- a frame disposed around at least a part of the vibrating arm and configuring the vibrating arm to vibrate, and
- a support arm connecting the base to the frame;
- and
- a first substrate including:
- a first recess defining at least a part of a vibration space for the resonator, and
- a first limiting portion disposed away from the support arm by a first distance in a thickness direction of the first substrate, with the first distance being smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate,
- wherein the first limiting portion is disposed at a position so as to overlap at least a portion of the support arm in a plan view.
A resonance device comprising:
- a resonator including:
- a base,
- a vibrating arm extending from a first end of the base along a first direction,
- a frame disposed around at least a part of the vibrating arm and configuring the vibrating arm to vibrate, and
- a support arm connecting the base to the frame;
- a first substrate including a first recess defining at least a part of a vibration space for the resonator;
- a second substrate facing the first substrate with the resonator interposed therebetween and including a second recess defining at least a part of the vibration space for the resonator;
- and
- a bonding portion configured to bond the resonator and the second substrate, with the bonding portion providing a predetermined distance between a surface of the second substrate facing the resonator and the support arm in a thickness direction of the second substrate,
- wherein the predetermined distance is smaller than a distance between the vibrating arm and a bottom surface of the second recess in the thickness direction of the second substrate
- wherein the first substrate includes a first limiting portion disposed away from the support arm by a first distance in a thickness direction of the first substrate, with the first distance being smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate, and
- wherein the first limiting portion is disposed at a position so as to overlap at least a portion of the support arm in a plan view.
Dependencies are inferred from the claim text.