Methods of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system
AssigneeKulicke and Soffa Industries, Inc.
InventorMatthew Tarabulski
Life of this patent
Estimating the term…
Abstract
A method of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system is provided. The method includes the steps of: (a) bringing a bonding tool assembly of a bonding system into contact with a support structure assembly of the bonding system; (b) sensing a vacuum leakage at an interface between the bonding tool assembly and the support structure assembly; and (c) adjusting a tilt of at least one of (i) the bonding tool assembly and (ii) the support structure assembly in response to the vacuum leakage sensed in step (b).
Claims19
A method of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system, the method comprising the steps of:
- (a) bringing a bonding tool assembly of a bonding system into contact with a support structure assembly of the bonding system;
- (b) sensing a vacuum leakage at an interface between the bonding tool assembly and the support structure assembly;
- (c) adjusting a tilt of at least one of (i) the bonding tool assembly and (ii) the support structure assembly in response to the vacuum leakage sensed in step (b) until an acceptable level of vacuum leakage is sensed;
- (d) moving the bonding tool assembly to an alignment height after step (c);
- and
- (e) determining a tilt change caused by moving the bonding tool assembly to the alignment height.
A method of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system, the method comprising the steps of:
- (a) bringing a bonding tool assembly of a bonding system into contact with a support structure assembly of the bonding system;
- (b) sensing a vacuum leakage at an interface between the bonding tool assembly and the support structure assembly;
- (c) adjusting a tilt of at least one of (i) the bonding tool assembly and (ii) the support structure assembly in response to the vacuum leakage sensed in step (b) until an acceptable level of vacuum leakage is sensed;
- (d) determining a tilt value of at least one of the bonding tool assembly and the support structure assembly using information from steps (b) and (c);
- (e) moving at least one of the bonding tool assembly and the support structure assembly to the tilt value;
- (f) moving the bonding tool assembly to an alignment height after step (e);
- (g) measuring a plurality of distances between portions of the support structure assembly and respective portions of the bonding tool assembly with the bonding tool assembly at the alignment height;
- and
- (h) determining a tilt change caused by moving the bonding tool assembly to the alignment height using the plurality of distance measurements.
A method of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system, the method comprising the steps of:
- (a) bringing a bonding tool assembly of a bonding system into contact with a support structure assembly of the bonding system;
- (b) adjusting a tilt of at least one of (i) the bonding tool assembly and (ii) the support structure assembly according to a tilt profile;
- (c) sensing a vacuum leakage at an interface between the bonding tool assembly and the support structure assembly during step (b);
- (d) further adjusting the tilt of at least one of (i) the bonding tool assembly and (ii) the support structure assembly in response to the vacuum leakage sensed in step (c) until an acceptable level of vacuum leakage is sensed;
- (e) moving the bonding tool assembly to an alignment height after step (d);
- and
- (f) determining a tilt change caused by moving the bonding tool assembly to the alignment height.
Dependencies are inferred from the claim text.