Multilayer coatings of component parts for a work piece processing chamber
AssigneeLam Researh Corporation
InventorsPaul Konkola, Ramesh Chandrasekharan, Andrew H. Breninger, Tony Shaleen Kaushal
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Abstract
A processing tool, comprising a processing chamber for processing a work piece, the processing chamber including at least one component part that is coated with multi-layer protective coating including (a) an aluminum layer formed on the at least one component part and (b) a ceramic coating formed on the aluminum layer. In various embodiments, the multi-layer protective coating can be applied to at least one component part prior to assembly of the processing chamber or at least partially in situ the processing chamber.
Claims20
A processing tool comprising a processing chamber for processing a work piece, the processing chamber including at least one component part subject to mechanical stress having a multi-layer coating including (a) an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, and (b) a deposited ceramic coating formed on the aluminum mechanical protection layer, wherein the deposited ceramic coating has a thickness of 10 microns or less, wherein the deposited the ceramic coating comprises yttrium oxide and is protective against fluorine, and wherein the at least one component part is made from an iron-containing alloy.
A method of forming at least one component part of a processing chamber subject to mechanical stress, comprising:
- electroplating the at least one component part to form an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, wherein the at least one component part is made of an iron-containing alloy;
- and
- depositing a deposited ceramic coating formed on the aluminum mechanical protection layer after the electroplating using vapor phase deposition, wherein the deposited ceramic coating has a thickness of 0.25 micron to 10 microns and is protective against fluorine, and wherein the electroplating and depositing is performed prior to assembly of the processing chamber including the at least one component part.
A processing tool comprising a processing chamber for processing a work piece, the processing chamber including at least one component part subject to mechanical stress having a multi-layer coating including (a) an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, and (b) a deposited ceramic coating formed on the aluminum mechanical protection layer, wherein the deposited ceramic coating has a thickness of 0.25 micron to 10 microns and is protective against fluorine, and wherein the at least one component part is made from an iron-containing alloy.
Dependencies are inferred from the claim text.